You are here: Home > EDX/XEDS Calibration

XEDS CALIBRATION
Suspended germanium providing unique calibration standard for x-ray energy dispersive spectroscopy

A uniform, deposited germanium (Ge) film for:

Detector energy axis and energy resolution calibration
Detector Window Transmission Evaluation
Detector solid angle measurements
Electron optical instrument system peak measurements
Specimen holder penumbra measurements

Since Ge is not typically found in TEM columns, our calibration samples provide a material that cannot be mistaken for instrument components and their signal peaks. The regime in which system peaks normally occur [ 2-9 keV and 11-20 keV ] is devoid of peaks from the Ge.
Typical Ge/SiNx spectral profile at ~1 nA and 200 kV

The Ge is suspended across two micron pores that are patterned on a grid of 20 nm thick silicon nitride.

The single 500 x 500 micron window is compatible with high tilt angle tomography, since at 70 degrees of tilt, the thin and beveled 100 micron silicon frame allows you to use a ~50x50 micron region within the center of the window from any rotational orientation.

These EDX calibration standards were developed in partnership with Dr. Nestor J. Zaluzec from the Electron Microscopy Center and the Center for Nanoscale Materials at Argonne National Laboratory.

For more information, please see the following abstracts.

Zaluzec NJ, DesOrmeaux JP, and Roussie J.
A Ge/SiNx Standard for Evaluating the Performance of X-ray Detectors in the SEM, S/TEM and AEM.
Microscopy and Microanalysis, 22(S3): 322-323.

Zaluzec NJ, Wen J, Wang J, and Miller DJ.
Quantitative Measurements of the Penumbra of XEDS Systems in an AEM.
Microscopy and Microanalysis, 22(S3): 278-279.

Sort By:
Page of 1
20 nm Germanium on Microporous 20 nm thick Silicon Nitride TEM Calibration Window (Single 500 micron window)
Our Price: $75.00

Suspended 20 nm thick germanium (Ge) over two micron pores
Microporous 20 nm thick, low-stress silicon nitride (SiN)
Two micron pores on 1:1 pitch grid pattern
100 micron thick frame, fits 3 mm sample holders
(1) 500 x 500 micron window

100% Satisfaction Guaranteed